The PELCO^® Silicon Aperture Frames are 3mm disc-type frames with a thickness of 200µm and square or rectangular apertures. They are useful for a variety of applications:

• Support frame to attach TEM lamellae made with FIB
• Support frame for thin films, foils, wires and fibers
• Mask for thin film research （deposition mask）

Detailed Measurements of Apertures

• Single Aperture Opening Sizes: 0.25 x 0.25mm, 0.5 x 0.5mm, 0.75 x 0.75mm, 1 x 1mm, and 0.5 x 1.5mm
• Multiple Aperture Opening Sizes: 9 windows of 0.1 x 0.1mm in a 3 x 3 array or 2 windows of 0.1 x 1.5mm
• Window Side Angle: 35.26°
• Aperture Frame Thickness: 200µm
• Aperture Frame Diameter: 3mm
• Aperture Material: Si
• Surface: Top side Si, back side （larger opening） has 50nm layer of Si3N4 for single aperture and 15nm Si3N4 for multiple apertures.
• Packaging: The PELCO^® Silicon Aperture Frames are packaged under cleanroom conditions in a small vial holding 10 discs.

Prod #

Description

Unit

21545-10

PELCO® Silicon Aperture Frame （no support film）, 0.25x0.25mm

vial/10

21540-10

PELCO® Silicon Aperture Frame （no support film）, 0.5x0.5mm

vial/10

21543-10

PELCO® Silicon Aperture Frame （no support film）, 0.75x0.75mm

vial/10

21541-10

PELCO® Silicon Aperture Frame （no support film）, 1.0x1.0mm

vial/10

21542-10

PELCO® Silicon Aperture Frame （no support film）, 0.5x1.5mm

vial/10

21548-10

PELCO® Silicon Aperture Frame （no support film）, with 2 each 0.1x1.5mm apertures

vial/10

21549-10

PELCO® Silicon Aperture Frame （no support film）, with 9 each 0.1x0.1mm apertures

vial/10