设备规格:
1.手动操作模式;
2. 适应于 2英寸-4英寸 晶圆或者支持 (100mmx100mm)样品;
3.退火温度范围 300℃-1000℃;
4.升温速率 ≦100℃/sec(裸片);
5.温度均匀性 ≦±1%(>500 ℃);
6.常压腔体(可选配真空腔体);
7.冷却方式包括水冷和氮气吹扫;
8.MFC控制,1-4路制程气体。
设备规格:
1.手动操作模式;
2. 适应于 2英寸-4英寸 晶圆或者支持 (100mmx100mm)样品;
3.退火温度范围 300℃-1000℃;
4.升温速率 ≦100℃/sec(裸片);
5.温度均匀性 ≦±1%(>500 ℃);
6.常压腔体(可选配真空腔体);
7.冷却方式包括水冷和氮气吹扫;
8.MFC控制,1-4路制程气体。
Larcomse Equipment (Shanghai) Co., Ltd. was established in 2018 and is located in Pudong New Area, Shanghai. The company focuses on the R & D, production and sales of semiconductor chip equipment, providing high-end equipment and high-quality services for the semiconductor chip manufacturing industry