Multi-layer SU-8 mold多层SU-8模具

多层SU-8模具

这个定制的SU-8主模具非常适合实验室生产的微流控芯片。一个经济有效的工具，用于软铸聚合物（如PDMS）以及热压成型工艺（CoC、PMMA、FlexDYM…）。

可在硅衬底上以高宽高比图案化多达4个SU-8层：

微观结构布局

微观结构布局应由客户以适当的文件格式（.cif、.dwg、.dxf）提供，或由我们的合作伙伴根据正确的格式进行调整。版图修改后，在制造之前，将向客户提供一份pdf文件，以供设计终批准。微观结构设计应考虑的主要方面：

文件格式：CIF、DWG或DXF文件。其他格式如DXF也可以接受。所有的结构都应该有闭合的轮廓。对所提供文件的任何修改都将收取额外费用。

有效面积：布局必须固定在直径为90mm的晶圆上。

切割：切割线应该画出来以备需要。

多层模具：应为不同的层提供对齐标记

Multi-layer SU-8 mold多层SU-8模具

Multi-layer SU-8 mold
This custom SU-8 master mold is perfect for your lab production of microfluidic chips. A cost-effective and useful tool for soft casting polymers (like PDMS) as well as hot-embossing processes (COC, PMMA, flexdym...).

Up to 4 SU-8 layers can be patterned with high aspect ratio on silicon substrates:

Microstructure layout
Microstructure layout should be provided by customers in an appropriate file format (.CIF, .DWG, .DXF) or they can be adapted to a correct format by our partner. After the revision of the layout, previously to the manufacturing, a PDF file will be provided to customer for the final approval of the design. The main aspects to be considered in the design of the microstructures:

File format: CIF, DWG or DXF files. Other formats as DXF may be accepted. All the structures should have closed contours. Any adaptation of the provided file will bring an extra charge.
Effective area: Layout must be fixed on 90 mm diameter of the wafer.
Dicing: The cutting lines should be drawn in case they are needed.
Multi-layer Molds: Alignment marks should be provided for the different layers

Multi-layer SU-8 mold多层SU-8模具